Zirconium Plate Target
Material: Zirconium Purity: 99.5%(2N5)-99.995%(4N5) Shape: Square, rectangular
Product Introduction
Zirconium is a grayish-white lustrous metal that belongs to the group of transition metals in the periodic table, zirconium is highly resistant to corrosion and has a high melting point, which makes it useful in a wide range of industrial applications
It is a thin, flat piece of zirconium metal that is used as a target in various applications, including physical vapor deposition (PVD) and sputtering. In these processes, a beam of ions or atoms is directed at it, causing it to erode and deposit a thin film of zirconium onto a substrate.
Other Alloy Zirconium targets can be customized, such as TiZr, NbZr, etc.
Zr plate target specification
Purity | 99.5%-99.995% |
Shape | planar, plate |
Material | Zirconium |
Dimension | 12x132x1701mm and customized drawing |
Surface Roughness | Ra 0.8-Ra 3.2 for target |
Grain size | <200um |
Size range | L200mm~2000mm x W40mm~500mm x T1mm~50mm as your custom |
Chemical Composition of Zr plate target(purity 99.5%)
Items Information | Sample Number | Remark | ||
No.01 | ||||
Chemical analysis | Cr | W / % | 0.012 | ASTM E2371-13 |
Fe | W / % | 0.02 | ||
Hf | W / % | 1.989 | ||
Items Information | Sample Number | Remark | ||
No.01 | ||||
Gas analysis | C | W / % | 0.011 | ASTM E1941-10 |
H | W / % | 0.0017 | ASTM E1447-09 | |
N | W / % | 0.0038 | ASTM E1409-13 | |
O | W / % | 0.089 | ||
Application
It is commonly used in the production of thin films for various applications, including optical coatings, semiconductor devices, and thin-film solar cells. They are often made from high-purity zirconium to ensure the quality and consistency of the deposited films.
The size and shape of it can vary depending on the specific application and the equipment being used. Zr targets may be circular, rectangular, or other shapes, and can range in size from a few centimeters to several meters.
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